Acceleration Voltage : 2 to 6 kV
Ion Beam Diameter : 500 µm (FWHM)
Milling Rate : 1.3µm/min
Maximum Specimen Size : 11mm(W) x 10mm(D) x 2mm(H)
Specimen Stage : X=ą3mm, Y=ą3mm
Specimen Alignment : ą5°
Gas : Argon / Pressure
Measurement : Penning gauge
Pumping System : TMP, RP
陳小姐 分機 6212
E-mail: lynn_chen@msscorps.com